Lithography FAQ
Q: Where can I find MSDSs for chemicals in which I’m interested?
A: These are controlled documents, so please contact a Sales or Customer Service Representative.
Q: Which Shin-Etsu resist is best for my application?
A: Are you looking for a photoresist or other photosensitive material, adhesion promoters, or advanced multi-layer materials such as silicon containing hard masks or dielectrics? Shin-Etsu offers many photoresists and ancillary products for broadband, i-line, DUV, and ArF applications. Wavelength is only one consideration. Other questions include feature size, exposure tool conditions, substrate, and thickness requirements. Please contact a Sales Representative detailed information and assistance.
Q: My company is discussing advanced packaging including 3D. Does Shin-Etsu offer any products in which we might be interested?
A: Yes, Shin-Etsu manufactures a wide range of materials for various packaging application levels. Please contact a Sales Representative for details.
Q: How about solvent compatibility?
A: In general, our materials are compatible with standard semiconductor solvent systems used for pre-wet, edge bead removal (EBR), or bowl rinse. In some cases such as multi-layer systems or barcs, there is a caution against using those materials in the same spin bowl as the photoresist. Please contact a Sales Representative for assistance.
Q: I see that Shin-Etsu offers ArF Immersion photoresists. How can I buy a six-pack?
A: We do not recommend our photoresists for tailgating. Shin-Etsu offers ArF photoresists that are compatible with topcoats available from Shin-Etsu and other suppliers, as well as photoresists that can be used without a topcoat that employ barriers against leaching during immersion. Topcoat free photoresists are used for leading edge semiconductor high volume manufacturing. Our technology permits highest possible scan speeds while minimizing the leaching of additives that can lead to immersion defects and/or exposure tool damage. Please contact a Sales Representative for assistance.
Q: With all of the emphasis on leading edge technology what can I expect for support of my new 8-inch development?
A: Shin-Etsu remains interested in older technology as a market leader. Viscosities (film thickness) of existing materials can be adjusted to fit your application needs. Please contact a Sales Representative for any applications, old or new.
Q: Where are Shin-Etsu Photoresists manufactured?
A: All Shin-Etsu photoresists are manufactured in Isobe and Noaetsu, Japan. Our adhesion promoters are packaged in Phoenix.
Q: What package sizes are available?
A: Shin-Etsu has the capability to package in sizes from quarts to 10 liter NowPacks.
Q: Are Shin-Etsu photoresist plants ISO certified?
A: Yes.