Nano-Imprint Templates
A growing number of companies are focusing on the development of devices using nano-imprint technologies. These devices include semiconductors, storage devices, optical parts, biochips and various MEMS devices. Shin-Etsu has developed a new line of synthetic quartz substrates for nano-imprint templates based upon our cutting edge production technologies.
FEATURES
High transmissivity to deep UV
UV-resistance
Low Thermal Expansion
High heat resistance
Dimensional accuracy
Flatness specifications are in sub-micron ranges
No defects and low surface roughness averages.
PRODUCTS
Please review the attached data sheet for sizes, shapes and other options.