PBN/PG Ceramic Heaters Data Sheet 620KB

	PBN	PG
Process	CVD (High Temperature) (Reduced pressure) BCl3+NH3?BN+3HCl	CVD (High Temperature) (Reduced pressure) CH4+ ?C+2H2
Structure	Boron Nitrogen	Carbon

PROPERTIES

Purity (Total metal impurities)	< 1 ppm	< 1 ppm
Maximum suggested use temperature	3000°C	3600°C

Tensile strength at high temperature (“a” direction)

r.t.	410kg/cm2	1050kg/cm2
2000°C	1030kg/cm2	1400kg/cm2
Chemical inertness	o	o
Thermal shock resistance	o	o
Machinability	o	o
Outgassing	Negligible	Negligible

RESISTIVITY

“a” direction 1000°C	3X107Ωcm	4X10-6Ωcm
“c” direction 1000°C	3X109Ωcm	2X10-3Ωcm

PBN/PG Performance advantages

• Operating temperature to = 1600°C.
• High mechanical durability and dimensional stability.
• Dimensionally compact. PBN layer provides electrical insulation.
• Thermal gradients can be tailored to meet specific requirements.
• Eliminate outgassing and contaminations.
• High thermal shock resistance.
• Chemically inert to almost all metals, liquids and gas.
• Large variety of shapes available.

	Wafer	Rectangle	Rod/Tube	Cup/Boat
Sizes (mm)	Ø380 MAX 1.0~3.0 thickness	260 X260 MAX 1.0~3.0 thickness	260 X260 MAX 1.0~3.0 thickness	Ø300 MAX 200 height MAX

Applications

Semiconductor substrate heating (MBE, MOCVD, Sputtering, CVD) Superconductor substrate heating Sample heating during analysis Sample for electron microscope heating

Melt heating Source heating during metal evaporation

Custom PBN/PG Heater Design

Required minimum information is as follows:

1. Shape…Size, structure of electrode.
2. Temperature and thermal gradients of application.
3. Atmosphere of application.
4. Power source.

Technical data

(1) Heating data of Ø4” heater

(2) Thermal gradients of Ø10” heater