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PBN/PG Ceramic Heaters |
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PBN/PG heaters combine three layers of ultra high purity ceramics, PBN-PG-PBN to produce an advanced heating element system. Both PBN (Pyrolytic Boron Nitride) and PG (Pyrolytic Graphite) are manufactured by high temperature CVD. These high performance elements exhibit outstanding thermal properties including high thermal conductivity and anisotropy.
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PBN/PG Ceramic Heaters
Data Sheet 
620KB
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STRUCTURE AND MANUFACTURING PROCESS
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The remarkable properties of PBN and PG have been combined by chemical vapor deposition as follows:
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PBN |
PG |
| Process |
CVD
(High Temperature)
(Reduced pressure)
BCl3+NH3?BN+3HCl |
CVD
(High Temperature)
(Reduced pressure)
CH4+ ?C+2H2 |
| Structure |
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PROPERTIES
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Purity
(Total metal impurities) |
< 1 ppm |
< 1 ppm |
| Maximum suggested use temperature |
3000°C
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3600°C
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Tensile strength at high temperature (“a” direction)
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| r.t. |
410kg/cm2 |
1050kg/cm2 |
| 2000°C |
1030kg/cm2 |
1400kg/cm2 |
| Chemical inertness |
o
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o
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| Thermal shock resistance |
o
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o
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| Machinability |
o
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o
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| Outgassing |
Negligible
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Negligible
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RESISTIVITY
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| “a” direction 1000°C |
3X107Wcm |
4X10-6Wcm |
| “c” direction 1000°C |
3X109Wcm |
2X10-3Wcm |
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PBN/PG Performance advantages
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- Operating temperature to = 11600°C.
- High mechanical durability and dimensional stability.
- Dimensionally compact. PBN layer provides electrical insulation.
- Thermal gradients can be tailored to meet specific requirements.
- Eliminate outgassing and contaminations.
- High thermal shock resistance.
- Chemically inert to almost all metals, liquids and gas.
- Large variety of shapes available.
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Wafer |
Rectangle |
Rod/Tube |
Cup/Boat |
| Sizes (mm) |
Ø380 MAX
1.0~3.0 thickness |
260 X260 MAX
1.0~3.0 thickness |
260 X260 MAX
1.0~3.0 thickness |
Ø300 MAX
200 height MAX |
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| Applications |
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Semiconductor substrate heating (MBE, MOCVD, Sputtering,
CVD)
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Superconductor substrate heating
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Sample heating during analysis
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Sample for electron microscope heating
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Custom PBN/PG Heater Design
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Required minimum information is as follows:
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- Shape…Size, structure of electrode.
- Temperature and thermal gradients of application.
- Atmosphere of application.
- Power source.
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Technical data
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(1) Heating data of Ø4” heater
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(2) Thermal gradients of Ø10” heater
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