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For use with Shin-Etsu MicroSi Contrast Enhancement Materials (CEM)
Barrier coats are thin transparent polymer films spin coated directly over the photoresist surface after softbake. Shin-Etsu MicroSi offers the following barrier coat products to be used in conjunction with Shin-Etsu MicroSi Contrast Enhancement Material (CEM) products
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Other
Applications |
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The thin transparent film can be used as a barrier between two photoresist layers to minimize interaction between the two resist layers. Shin-Etsu MicroSi Barrier Coat products are used in the disc mastering production industry for the production for CD ‘s and DVD’s. |
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Contrast Enhancement Materials Guideline
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| Barrier Coat (BC) |
Thickness@4000 rpm |
CEM product |
| BC-5.0 |
950 ± Å |
365WSHR, 388WS, 388PG, 420WS, 420WSF |
| BC-7.5 |
4500 ± Å |
388SS, 420SS |
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Other Applications
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| Barrier Coat (BC) |
Thickness@4000 rpm |
Application |
| BC-5.3 |
1350 ± Å |
Disc mastering |
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