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CEM-365HR |
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Optimized for photoresist thickness less than approximately 0.60µm and critical dimensions as low as 0.25µm with a NA= 0.60 stepper. Can be used with positive or negative photoresist systems. Water based solvent system.
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CEM-365HR
90KB
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Specifications:
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| Solids |
8.5 ± 1.0 % |
| Viscosity @ 25 Deg C |
2.0 ± 0.5 cstks |
| Refractive index |
1.59 |
| Film thickness |
1,500 ± 200 Å @ 4,000 rpm |
| Appearance |
Clear, Yellow |
| Initial transmission (365 nm) |
< 16.5 % |
| Final transmission (365 nm) |
> 83.5 % |
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Figure 1
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