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CEM-388PG |
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Optimized for photoresist thickness less than approximately 6.0µm. Broadband response ideal for g-h-I exposure systems (e.g., Suss MicroTec). Can be used with positive or negative photoresist systems. Propylene glycol methyl ether acetate (PGMEA) solvent system.
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CEM-388PG
Data Sheet 
98KB
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Specifications:
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| Solids |
18.5 ± 2.0 % |
| Viscosity @ 25 Deg C |
7.5 ± 0.5 cstks |
| Refractive index |
1.58 |
| Film thickness |
6,100Å ± 400Å @ 4,000 rpm |
| Appearance |
Clear, Yellow |
| Initial transmission (365 nm) |
< 2% |
| Final transmission (365 nm) |
> 90% |
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Figure 1
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