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Fused Quartz

Fused quartz is a form of glass that varies tremendously from that of more traditional glass in that it is composed completely of high purity silica. No other components are added to the silica to lower the melting temperature, meaning that fused quartz has higher working temperatures than most other glasses. Due to its stability at high temperatures as well its high levels of purity, fused quartz is commonly used by the semiconductor manufacturing industry to process quartz wafers and create synthetic quartz photomasks.

Fused synthetic quartz glass for semiconductor manufacturing is created using pure, natural crystalline silica, such as sand or rock crystal. The silica is melted using either an electrically heated furnace, in which case electrically fused quartz is produced, or a gas heated furnace, in which flame fused quartz is produced. Both methods fuse the silica at high temperatures of around 2000 degrees Celsius. At the end of the process, a transparent or opaque fused quartz is created.

Fused synthetic quartz is used not only in the semiconductor manufacturing industry, but a huge variety of other industries due to its highly beneficial properties:

  • Hardness
  • Permeability
  • Low thermal expansion
  • Stability at high temperatures
  • High chemical purity
  • High resistance to corrosion
  • Electrical insulation
  • Optical transparency over large spectral range

The above properties make fused synthetic quartz glass a great material for many applications in the semiconductor manufacturing industry. The high purity level, strength, low thermal expansion and transparency are especially beneficial. Using synthetic quartz glass, the semiconductor industry is able to produce materials, such as synthetic quartz photomasks for photolithography as well as quartz wafers for fabrication.

If you are interested in fused quartz materials for your semiconductor manufacturing operations, trust in the semiconductor manufacturing suppliers at Shin-Etsu MicroSi. We offer our customers pure, fused quartz materials and other high quality materials required to create more efficient semiconductor production processes. For more information on quartz wafers, synthetic quartz photomasks or other fused quartz materials, please call Shin-Etsu MicroSi at (480) 893-8898 or contact us online.