Crucibles & Other Products

PBN Crucibles And Other Products

pbn1

 

Since our establishment in 1926, Shin-Etsu Chemical Company has become a world leader in the development and manufacture or many types’ of plastics resins. These include silicon, methylcellulose and polyvinyl chloride. We have become one of the world’s leading suppliers of semiconductor silicon, synthetic quartz and GGG (gadolinium gallium garnet). Shin-Etsu’s name is recognized around the world for our ability to manufacture and supply a line of high-purity, high-precision and high-performance products for the ever expanding high-tech industry. Recently we introduced a new line of Pyrolytic Boron Nitride (PBN) materials, including crucibles, boats, rods, wafers, plates, tubes and graphite coatings.

 

This high-purity ceramic has excellent chemical resistance and strength at high temperatures. Shin-Etsu MicroSi’s PBN is manufactured by a proprietary chemical vapor deposition (CVD) process which produces the following reaction:

 

BCl3 + NH3 à BN +3HCl

 

PBN is deposited on a graphite substrate at a temperature over 1800°C and under a pressure of less than 1 Torr in a specially-designed reaction chamber. PBN is then either released an a free-standing molded form or left as it is as a thin-layered, highly-oriented crystalline PBN coating on a graphite substrate. This thin layer, analogous to pyrolytic graphite in crystalline form, is composed of laminar hexagonal boron nitride.

 

PBN CHARACTERISTICS

  • High purity
  • High compositional homogeneity
  • Uniform wall thickness (circumferential direction)
  • Easily adjustable thickness (axial direction)
  • Excellent durability
  • Minimal out gassing at high temperature and vacuum
  • Non-toxic

 

PROPERTIES

Mechanical Properties
PBN has a high tensile strength. It is perfect for use in a range of high temperature because of the special characteristic of increasing its strength as the temperature rises.


Thermal Properties

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The thermal conductivity of PBN is very good and has a high degree of anisotrophy; conductivity in the “a” direction is higher than in the “c” direction by approximately 20 times. The secret of this high anisotropy is in PBN’s laminar structure.

 

ELECTRICAL PROPERTIES

The electrical resistivity of PBN is high and anisotropic. In this respect, PBN is very different from graphite which is a good electrical conductor. PBN is an excellent high-temperature insulation material.

 

CHEMICAL PROPERTIES

PBN is chemically stable and non-toxic. It is resistant to oxidation while impurities are almost non-detectable. Shin-Etsu’s CVD process at high temperature, under reduced pressure enables the production of PBN with ultra low levels of impurities. PBN does not react with metal, glass and III-V compounds. It is also able to withstand the shocks associated with rapid heating or quenching.

 

Impurity Concentration Test Methods
Ca N.D. I.C.P.
Cu N.D. I.C.P.
Co N.D. I.C.P.
Fe N.D. I.C.P.
Mn N.D. I.C.P.
Ni N.D. I.C.P.
Zn N.D. I.C.P.
Na N.D. Flameless Atomic Absorption
Si N.D. I.C.P.

 

PBN Applications

 

PBN Crucibles and Boats

For thin film solar cell device manufacturing, Shin-Etsu now offers customized PBN crucibles (Pyrolytic Boron Nitride), boats and other products for copper, indium, gallium and selenide (CIGS) film deposition processes. Both PBN crucibles coated graphite and pure PBN parts offer high purity and stability with very limited outgassing. These PBN crucibles are high heat and thermal shock resistant with excellent thermal insulation. The PBN crucibles (Pyrolytic Boron Nitride) are chemically stable and non-toxic. They’re also resistant to oxidation while impurities are almost non-detectable.

Shin-Etsu also offers PBN/PG (Pyrolytic Graphite) heaters and PBN coated graphite heaters for application specific solar requirements.

Shin-Etsu MicroSi’s PBN (Pyrolytic Boron Nitride) properties include an excellent tensile strength at high temperatures, chemical inertness, high purity, outstanding thermal conductivity and high electrical resistivity. In addition to being ideal for crucibles and boats in the crystal growth of III-V compounds used in semiconductors, PBN is used in numerous other applications in the electronics industry.

 

crucib7 crucib8

These include:

  • Crucibles, Dishes
  • Boats , Trays
  • Electrical Insulators
  • Graphite Coatings
  • Infrared Windows
  • Furnace Components
  • Vaporizing Pots
  • Nozzles, Pipes, Rods
  • Heat Insulators
  • Boron Dopants

 

Product Specifications and Dimensions:

PBN Data Sheet 1.43meg