PBN/PG Heaters

The PBN/PG ceramic heater combines three layers of ultra-high purity ceramics, PBN-PG-PBN to produce an advanced micro-ceramic heating element system. Both our PBN heater (Pyrolytic Boron Nitride) and PG heater (Pyrolytic Graphite) are manufactured by high temperature CVD. These high performance elements exhibit outstanding thermal properties in a ceramic heater, including high thermal conductivity and anisotropy.

 

PBN/PG Ceramic Heaters Data Sheet 620KB

 

STRUCTURE AND MANUFACTURING PROCESS

The remarkable properties of PBN and PG have been combined by chemical vapor deposition as follows:

pic1

 

PBN PG
Process CVD
(High Temperature)
(Reduced pressure)
BCl3+NH3?BN+3HCl
CVD
(High Temperature)
(Reduced pressure)
CH4+ ?C+2H2
Structure

  • Boron
  • Nitrogen

  • Carbon

 

PROPERTIES

Purity
(Total metal impurities)
< 1 ppm < 1 ppm
Maximum suggested use
temperature
3000°C 3600°C

 

Tensile strength at high temperature (“a” direction)

r.t. 410kg/cm2 1050kg/cm2
2000°C 1030kg/cm2 1400kg/cm2
Chemical inertness o o
Thermal shock resistance o o
Machinability o o
Outgassing Negligible Negligible

 

RESISTIVITY

“a” direction 1000°C 3X107Ωcm 4X10-6Ωcm
“c” direction 1000°C 3X109Ωcm 2X10-3Ωcm

 

PBN/PG Performance advantages

  • Micro-ceramic heating element has an operating temperature to = 1600°C.
  • High mechanical durability and dimensional stability.
  • Dimensionally compact. PBN layer provides electrical insulation.
  • Thermal gradients can be tailored to meet specific requirements.
  • Eliminate outgassing and contaminations.
  • High thermal shock resistance.
  • Chemically inert to almost all metals, liquids and gas.
  • Large variety of PG heater and PGN heater shapes available.

 

Wafer Rectangle Rod/Tube Cup/Boat
Sizes (mm) Ø380 MAX
1.0~3.0
thickness
260 X260 MAX
1.0~3.0
thickness
260 X260 MAX
1.0~3.0
thickness
Ø300 MAX
200 height MAX
heater1 heater2 heater3 heater4

 

Applications
  • Semiconductor substrate heating (MBE, MOCVD, Sputtering, CVD)
  • Superconductor substrate heating
  • Sample heating during analysis
  • Sample for electron microscope heating
  • Melt heating
  • Source heating during metal evaporation

Custom PBN/PG Heater Design

Required minimum information is as follows:

  1. Shape…Size, structure of electrode.
  2. Temperature and thermal gradients of application.
  3. Atmosphere of application.
  4. Power source.

Technical data

(1) Heating data of Ø4” heater

heater5

(2) Thermal gradients of Ø10” heater

heater6

tube heater