Shin-Etsu MicroSi has been focusing on the advancement our nanolithography division for the development of nanocircuitry devices using the latest in nanolithography technology. We have developed a new line of synthetic quartz substrates for nanoimprint templates based upon our cutting edge production of nanocircuitry technologies. Our nanoimprint templates are offered in many different sizes, including custom sizes for any specific needs requested by the customer. Aside from nanoimprint templates, our other nanocircuitry devices include semiconductors, storage devices, optical parts, biochips and various MEMS devices.
- High transmissivity to deep UV
- Low Thermal Expansion
- High heat resistance
- Dimensional accuracy
- Flatness specifications are in sub-micron ranges
- No defects and low surface roughness averages.
Please review the attached data sheet for sizes, shapes and other options.
VIOSIL-SQ, SX (TS series)