Synthetic Quartz Glass Substrates

synthetic quarts photomask substrates


VIOSIL-SQ (For General Application)

VIOSIL-SX (For High Temperature Application)

Links to Technical Data Sheets

Synthetic Quartz Glass Substrates (330.14kB)

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Product Description


  • Purity: high purity completely eliminates contamination.
  • Chemical resistance: high stability against a variety of solvents.
  • Heat resistance: high dimensional stability over a wide temperature range.
  • Transparency: high transmissivity over a wide range of wavelengths from UV to IR.
  • Fluorescence: no fluorescence over a wide range of wavelengths from UV to IR.
  • Dielectric properties: low dielectric loss even at GHz frequencies.
  • Surface: high flatness, high uniformity of thickness and smooth surface, thanks to techniques developed for photomask substrates used in LSI manufacturing.