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Synthetic Quartz Photomask Substrate KNFS6025

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Datasheet

“KNFS6025 ” for ArF High-NA and Immersion Lithography

Product Description

[table class=”thermal-grease”]
Property,Value

Laser source,ArF
“Wavelength”, 193.4nm
Specific Gravity, 2.8
Thermal Conductivity(W/m °K), 3.0
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