How about solvent compatibility?

In general, our materials are compatible with standard semiconductor solvent systems used for pre-wet, edge bead removal (EBR), or bowl rinse. In some cases such as multi-layer systems or barcs, there is a caution against using those materials in the same spin bowl as the photoresist. Please contact a Sales Representative for assistance.

COVID-19 Statement:
At this time, Shin-Etsu MicroSi, Inc. is open and running as normal. We are continuing to monitor the situation closely and follow the guidance of public health officials, CDC, WHO, and local and U.S. Governments, to quickly move to take the appropriate precautions. We may adjust our normal operating procedures to support social distancing guidelines. We will continue to keep you informed of any developments.