I see that Shin-Etsu offers ArF Immersion photoresists. How can I buy a six-pack?

Shin-Etsu offers ArF photoresists that are compatible with topcoats available from Shin-Etsu and other suppliers, as well as photoresists that can be used without a topcoat that employ barriers against leaching during immersion. Topcoat free photoresists are used for leading edge semiconductor high volume manufacturing. Our technology permits highest possible scan speeds while minimizing the leaching of additives that can lead to immersion defects and/or exposure tool damage. Please contact a Sales Representative for assistance.

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At this time, Shin-Etsu MicroSi, Inc. is open and running as normal. We are continuing to monitor the situation closely and follow the guidance of public health officials, CDC, WHO, and local and U.S. Governments, to quickly move to take the appropriate precautions. We may adjust our normal operating procedures to support social distancing guidelines. We will continue to keep you informed of any developments.