I see that Shin-Etsu offers ArF Immersion photoresists. How can I buy a six-pack?
Shin-Etsu offers ArF photoresists that are compatible with topcoats available from Shin-Etsu and other suppliers, as well as photoresists that can be used without a topcoat that employ barriers against leaching during immersion. Topcoat free photoresists are used for leading edge semiconductor high volume manufacturing. Our technology permits highest possible scan speeds while minimizing the leaching of additives that can lead to immersion defects and/or exposure tool damage. Please contact a Sales Representative for assistance.