Which Shin-Etsu resist is best for my application?

A: Are you looking for a photoresist or other photosensitive material, adhesion promoters, or advanced multi-layer materials such as silicon containing hard masks or dielectrics? Shin-Etsu offers many photoresists and ancillary products for broadband, i-line, DUV, and ArF applications. Wavelength is only one consideration. Other questions include feature size, exposure tool conditions, substrate, and thickness requirements. Please contact a Sales Representative detailed information and assistance.


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