Nanoimprint templates

Shin-Etsu MicroSi has been focusing on the advancement our nanolithography division for the development of nanocircuitry devices using the latest in nanolithography technology.  We have developed a new line of synthetic quartz substrates for nanoimprint templates based upon our cutting edge production of nanocircuitry technologies.

Our nanoimprint templates are offered in many different sizes, including custom sizes for any specific needs requested by the customer. Aside from nanoimprint templates, our other nanocircuitry devices include semiconductors, storage devices, optical parts, biochips and various MEMS devices.

Product Features:

  • High transmissivity to deep UV
  • UV-resistance
  • Low Thermal Expansion
  • High heat resistance
  • Dimensional accuracy
  • Flatness specifications are in sub-micron ranges
  • No defects and low surface roughness averages.

Nanoimprint Products:

Please review the attached data sheet for sizes, shapes and other options.

Nanoimprints Templates (772.88kB)

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COVID-19 Statement:
At this time, Shin-Etsu MicroSi, Inc. is open and running as normal. We are continuing to monitor the situation closely and follow the guidance of public health officials, CDC, WHO, and local and U.S. Governments, to quickly move to take the appropriate precautions. We may adjust our normal operating procedures to support social distancing guidelines. We will continue to keep you informed of any developments.