PBN / PG Heaters

The PBN/PG ceramic heater combines three layers of ultra-high purity ceramics, PBN-PG-PBN to produce an advanced micro-ceramic heating element system. Both our PBN heater (Pyrolytic Boron Nitride) and PG heater (Pyrolytic Graphite) are manufactured by high temperature CVD. These high performance elements exhibit outstanding thermal properties in a ceramic heater, including high thermal conductivity and anisotropy.

Structure and Manufacturing Process:

The remarkable properties of PBN and PG have been combined by chemical vapor deposition as follows:

PBNPG
ProcessCVD (High Temperature) (Reduced pressure) BCl3+NH3?BN+3HClCVD (High Temperature) (Reduced pressure) CH4+ ?C+2H2
Structure
  • Boron
  • Nitrogen
  • Carbon

Properties:

Purity
(Total metal impurities)
< 1 ppm< 1 ppm
Maximum suggested use
temperature
3000°C3600°C

Tensile strength at high temperature ("a" direction):

r.t.410kg/cm21050kg/cm2
2000°C1030kg/cm21400kg/cm2
Chemical inertnessoo
Thermal shock resistanceoo
Machinabilityoo
OutgassingNegligibleNegligible

Resistivity

“a” direction 1000°C3X107Ωcm4X10-6Ωcm
“c” direction 1000°C3X109Ωcm2X10-3Ωcm

PBN/PG Performance Advantages:

WaferRectangleRod/TubeCup/Boat
Sizes (mm)Ø380 MAX
1.0~3.0
thickness
260 X260 MAX
1.0~3.0
thickness
260 X260 MAX
1.0~3.0
thickness
Ø300 MAX
200 height MAX
 heater1heater2heater3heater4
Applications
  • Semiconductor substrate heating (MBE, MOCVD, Sputtering, CVD)
  • Superconductor substrate heating
  • Sample heating during analysis
  • Sample for electron microscope heating
  • Melt heating
  • Source heating during metal evaporation

Custom PBN/PG Heater Design:

Required minimum information is as follows:

 

  1. Shape…Size, structure of electrode.
  2. Temperature and thermal gradients of application.
  3. Atmosphere of application.
  4. Power source.

Technical Data:

(1) Heating data of Ø4” heater

(2) Thermal gradients of Ø10” heater

Tube Heater - Shin-Etsu MicroSi