VIOSIL-SQ, SX (TS series)

A growing number of companies are focusing on the development of devices using nano-imprint technologies. These devices include semiconductors, storage devices, optical parts, biochips and various MEMS devices. Shin-Etsu has developed a new line of synthetic quartz substrates for nano-imprint templates based upon our cutting edge production technologies.

Links to Technical Data Sheets

Synthetic Quartz Glass Substrates for Nano-Imprint Templates Datasheet (772.88kB)

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Product Description