CEM (Contrast Enhancement Material) is a photo-bleachable material, water soluble layer which is initially opaque to the exposure wavelength(s), but it becomes nearly transparent (»90% transmission) upon exposure. Contrast enhancement material is spun onto the photoresist surface. After conventional exposure, the CEM layer is removed with DI water followed by the resist developing. Because of the presence of the bleachable material, the resist contrast is dramatically improved. This CEM bleachability depends on the film thickness, photochemical properties of the CEM and the dose required to expose the resist.