Additional information
| Mask | CD = 20μm L&S |
|---|---|
| Exp. | (i-line) = 1000mJ |
| FT | 22μm |
| SB | 100°C / 120 sec |
| PEB | 110°C X 90 sec |
| Mask | CD = 20μm L&S |
|---|---|
| Exp. | (i-line) = 1000mJ |
| FT | 22μm |
| SB | 100°C / 120 sec |
| PEB | 110°C X 90 sec |